Spatial distribution of the absolute densities of CF[sub x] radicals in fluorocarbon plasmas determined from single-path infrared laser absorption and laser-induced fluorescence
- 期刊名称Journal of Applied Physics
- 作者Nakamura, Masayuki; Hori, Masaru; Goto, Toshio; Ito, Masafumi; Ishii, Nobuo
- 卷第90卷
- 期第2期
- 印刷ISSN0021-8979
- 文件大小393.64KB
- 发表时间2001
- DOI10.1063/1.1337090
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