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[IEEE 2001 IEEE Hong Kong Electron Devices Meeting - Hong Kong, China (30 June 2001)] Proceedings 2001 IEEE Hong Kong Electron Devices Meeting (Cat. No.01TH8553) - Annealing effects on ultrathin MOS capacitors

[IEEE 2001 IEEE Hong Kong Electron Devices Meeting - Hong Kong, China (30 June 2001)] Proceedings 2001 IEEE Hong Kong Electron Devices Meeting (Cat. No.01TH8553) - Annealing effects on ultrathin MOS capacitors

Ng, A.C.-H.; Jun Xu, ; Xu, J.B.; Cheung, W.Y.

作者Ng, A.C.-H.; Jun Xu, ; Xu, J.B.; Cheung, W.Y.
文件大小324.96KB
发表时间2001
DOI10.1109/hkedm.2001.946928
页码101-105

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