[IEEE 2001 Digest of LEOS Summer Topical Meetings: Advanced Semicondutor Lasers and Applications/Ultraviolet and Blue Lasers and Their Applications/Ultralong Haul DWDM Transmission and Networking/WDM Components - Copper Mountain, CO, USA (30 July-1 Aug. 2001)] 2001 Digest of LEOS Summer Topical Meetings: Advanced Semiconductor Lasers and Applications/Ultraviolet and Blue Lasers and Their Applications/Ultralong Haul DWDM Transmission and Networking/WDM Components (IEEE Cat. No.01TH8572) - Short wavelength sources for microlithography