Real Time Spectroscopic Ellipsometry Study on Growth Processes of ZrO[sub 2] Thin Films in Metallorganic Chemical Vapor Deposition
- 期刊名称Journal of The Electrochemical Society
- 作者Kubota, Takeo; Hara, Nobuyoshi; Sugimoto, Katsuhisa
- 卷第148卷
- 期第9期
- 印刷ISSN0013-4651
- 文件大小732.28KB
- 发表时间2001
- DOI10.1149/1.1388885
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