Single Chemistry Cleaning Solution for Advanced Wafer Cleaning

Vos, Rita; Doll, O.; Fester, A.; Kolbesen, Bernd O.; Lux, Marcel; Kenis, Karine; Onsia, Bart; Degendt, S.; Schellkes, E.; Hatcher, Z.; Mertens, Paul W.; Heyns, Marc M.

期刊名称Solid State Phenomena
作者Vos, Rita; Doll, O.; Fester, A.; Kolbesen, Bernd O.; Lux, Marcel; Kenis, Karine; Onsia, Bart; Degendt, S.; Schellkes, E.; Hatcher, Z.; Mertens, Paul W.; Heyns, Marc M.
电子ISSN1662-9779
文件大小302.34KB
发表时间2001
DOI10.4028/www.scientific.net/SSP.76-77.119
页码119-122

发现好书期刊，享受阅读乐趣

Single Chemistry Cleaning Solution for Advanced Wafer Cleaning