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Modeling and simulation of feature-size-dependent etching of metal stacks

Modeling and simulation of feature-size-dependent etching of metal stacks

S. Abdollahi-alibeik; J. Zheng; J. P. Mcvittie; K. C. Saraswat; C. T. Gabriel; S. C. Abraham
  • 作者S. Abdollahi-alibeik; J. Zheng; J. P. Mcvittie; K. C. Saraswat; C. T. Gabriel; S. C. Abraham
  • 文件大小1073.24KB
  • 发表时间2001
  • DOI10.1116/1.1340664
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