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Effect of thinning a WSiN/WSi[sub x] barrier layer on its barrier capability

Effect of thinning a WSiN/WSi[sub x] barrier layer on its barrier capability

A. Hirata; T. Maeda; K. Machida; M. Maeda; K. Yasui; H. Kyuragi

作者A. Hirata; T. Maeda; K. Machida; M. Maeda; K. Yasui; H. Kyuragi
文件大小804.43KB
发表时间2001
DOI10.1116/1.1368681

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