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Spatial Profile Measurements of Charged Particles in Capacitively-Coupled RF (13.56 MHz) Oxygen Discharges

Spatial Profile Measurements of Charged Particles in Capacitively-Coupled RF (13.56 MHz) Oxygen Discharges

Kaga, Kouji; Kimura, Takashi; Ohe, Kazuyuki
  • 期刊名称Japanese Journal of Applied Physics
  • 作者Kaga, Kouji; Kimura, Takashi; Ohe, Kazuyuki
  • 卷第40卷
  • 印刷ISSN0021-4922
  • 电子ISSN1347-4065
  • 文件大小54.75KB
  • 发表时间2001-1-15
  • DOI10.1143/JJAP.40.330
  • 页码330-331
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