Photoluminescence from Thermally Oxidized Hydrogenated Amorphous Silicon Nanoball Films Fabricated by Double-Tubed-Coaxial-Line-Type Microwave Plasma Chemical Vapor Deposition System
- 期刊名称Japanese Journal of Applied Physics
- 作者Kato, Isamu; Matsumoto, Takayuki; Agnihotri, O. P.
- 卷第40卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小156.37KB
- 发表时间2001-12-15
- DOI10.1143/JJAP.40.6862
- 页码6862-6867
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