Slit Structure as a Countermeasure for the Thermal Deformation of a Metal Mask
- 期刊名称Japanese Journal of Applied Physics
- 作者Yamazaki, Toshinari; Yoshizawa, Toshio; Yamabuchi, Tatsuo; Hirobayashi, Shigeki; Kikuta, Toshio; Nakatani, Noriyuki; Mizuguchi, Takashi
- 卷第40卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小268.63KB
- 发表时间2001-12-15
- DOI10.1143/JJAP.40.7170
- 页码7170-7173
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