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Suppressing the surface roughness and columnar growth of silicon nitride films

Suppressing the surface roughness and columnar growth of silicon nitride films

Wentao Xu; Boquan Li; Toshiyuki Fujimoto; Isao Kojima
  • 作者Wentao Xu; Boquan Li; Toshiyuki Fujimoto; Isao Kojima
  • 卷第135卷
  • 印刷ISSN0257-8972
  • 文件大小337.64KB
  • 发表时间2001
  • DOI10.1016/s0257-8972(00)01070-7
  • 页码274-278
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