Experimental and numerical investigation of a capacitively coupled low-radio frequency nitrogen plasma
- 作者S Conti; P.I Porshnev; A Fridman; L.A Kennedy; J.M Grace; K.D Sieber; D.R Freeman; K.S Robinson
- 卷第24卷
- 印刷ISSN0894-1777
- 文件大小713.43KB
- 发表时间2001
- DOI10.1016/s0894-1777(01)00040-1
- 页码79-91
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