A noble suspended type thin film resonator (STFR) using the SOI technology
- 作者Hyun Ho Kim; Byeong Kwon Ju; Yun Hi Lee; Si Hyung Lee; Jeon Kook Lee; Soo Won Kim
- 卷第89卷
- 期第3期
- 印刷ISSN0924-4247
- 文件大小456.68KB
- 发表时间2001
- DOI10.1016/s0924-4247(00)00551-3
- 页码255-258