SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Comparison of linewidth measurements on COG masks
- 作者Bosse, Harald; Mirande, Werner; Frase, Carl G.; Brueck, Hans-Juergen; Lehnigk, Sigrid; Behringer, Uwe F. W.
- 卷第4349卷
- 印刷ISSN0277-786X
- 文件大小980.05KB
- 发表时间2001
- DOI10.1117/12.425082
- 页码99-108
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