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SPIE Proceedings [SPIE Smart Materials and MEMS - Melbourne, Australia (Wednesday 13 December 2000)] Smart Electronics and MEMS II - <title>MEMS in Singapore</title>

SPIE Proceedings [SPIE Smart Materials and MEMS - Melbourne, Australia (Wednesday 13 December 2000)] Smart Electronics and MEMS II - MEMS in Singapore

Tay, Francis E.; Abbott, Derek; Varadan, Vijay K.; Boehringer, Karl F.

作者Tay, Francis E.; Abbott, Derek; Varadan, Vijay K.; Boehringer, Karl F.
卷第4236卷
印刷ISSN0277-786X
文件大小839.42KB
发表时间2001
DOI10.1117/12.418752
页码7-12

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