SPIE Proceedings [SPIE 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Munich, Germany (Monday 13 November 2000)] 17th European Conference on Mask Technology for Integrated Circuits and Microcomponents - Strategies for wafer-scale hot embossing lithography
- 作者Scheer, Hella-Christin; Schulz, Hubert; Lyebyedyev, D.; Behringer, Uwe F. W.
- 卷第4349卷
- 印刷ISSN0277-786X
- 文件大小510.87KB
- 发表时间2001
- DOI10.1117/12.425080
- 页码86-89
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