SPIE Proceedings [SPIE Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Cannes-Mandelieu, France (Wednesday 25 April 2001)] Design, Test, Integration, and Packaging of MEMS/MOEMS 2001 - Modular concept for the design of application-specific integrated telemetric systems
- 作者Marschner, Claudia; Rehfuss, Sven; Peters, Dagmar; Bolte, Hilmar; Laur, Rainer; Courtois, Bernard; Karam, Jean Michel; Levitan, Steven P.; Markus, Karen W.; Tay, Andrew A. O.; Walker, James A.
- 卷第4408卷
- 印刷ISSN0277-786X
- 文件大小870.45KB
- 发表时间2001
- DOI10.1117/12.425383
- 页码246-253
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