SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - Development of a laser micromachining toolbox and its application to the production of 3D microstructures
Greuters, Jako; Rizvi, Nadeem H.; Behringer, Uwe F. W.; Uttamchandani, Deepak G.
- 作者Greuters, Jako; Rizvi, Nadeem H.; Behringer, Uwe F. W.; Uttamchandani, Deepak G.
- 卷第4407卷
- 印刷ISSN0277-786X
- 文件大小122.31KB
- 发表时间2001
- DOI10.1117/12.425325
- 页码380-387