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SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - <title>Development of a laser micromachining toolbox and its application to the production of 3D microstructures</title>

SPIE Proceedings [SPIE Microelectronic and MEMS Technologies - Edinburgh, United Kingdom (Wednesday 30 May 2001)] MEMS Design, Fabrication, Characterization, and Packaging - Development of a laser micromachining toolbox and its application to the production of 3D microstructures

Greuters, Jako; Rizvi, Nadeem H.; Behringer, Uwe F. W.; Uttamchandani, Deepak G.
  • 作者Greuters, Jako; Rizvi, Nadeem H.; Behringer, Uwe F. W.; Uttamchandani, Deepak G.
  • 卷第4407卷
  • 印刷ISSN0277-786X
  • 文件大小122.31KB
  • 发表时间2001
  • DOI10.1117/12.425325
  • 页码380-387
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