SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Device and Process Technologies for MEMS and Microelectronics II - Enabling MEMS technologies for communications systems
Lubecke, Victor M.; Barber, Bradley P.; Arney, Susanne; Chiao, Jung-Chih; Faraone, Lorenzo; Harrison, H. Barry; Shkel, Andrei M.
- 作者Lubecke, Victor M.; Barber, Bradley P.; Arney, Susanne; Chiao, Jung-Chih; Faraone, Lorenzo; Harrison, H. Barry; Shkel, Andrei M.
- 卷第4592卷
- 印刷ISSN0277-786X
- 文件大小1009.83KB
- 发表时间2001
- DOI10.1117/12.448975
- 页码257-266