Characterization of Electron Beam Evaporated Carbon Films and Compound Formation on Titanium and Silicon
- 期刊名称Physica Scripta
- 作者Luthin, J.; Linsmeier, Ch.
- 期第1期
- 印刷ISSN0031-8949
- 文件大小183.06KB
- 发表时间2001
- DOI10.1238/Physica.Topical.091a00134
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