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Characterization of the density, structure and chemical states of carbon nitride films

Characterization of the density, structure and chemical states of carbon nitride films

Wentao Xu; Toshiyuki Fujimoto; Boquan Li; Isao Kojima

作者Wentao Xu; Toshiyuki Fujimoto; Boquan Li; Isao Kojima
印刷ISSN0169-4332
文件大小98.05KB
发表时间2001
DOI10.1016/s0169-4332(01)00100-3
页码456-461

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