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Structural and electrical properties of sputtered titanium boronitride films

Structural and electrical properties of sputtered titanium boronitride films

J.F. Pierson; F. Bertran; J.P. Bauer; J. Jolly

作者J.F. Pierson; F. Bertran; J.P. Bauer; J. Jolly
印刷ISSN0257-8972
文件大小148.66KB
发表时间2001
DOI10.1016/s0257-8972(01)01124-0
页码906-910

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