Microfabricated Plastic Devices from Silicon Using Soft Intermediates

• 作者A. Peter Russo; Dace Apoga; Natalie Dowell; William Shain; Andrea M. P. Turner; Harold G. Craighead; Harvey C. Hoch; James N. Turner
• 卷第4卷
• 期第4期
• 印刷ISSN1387-2176
• 电子ISSN1572-8781
• 文件大小802.25KB
• 发表时间2002-12
• DOI10.1023/a:1020902106144
• 页码277-283