发现好书期刊,享受阅读乐趣

海量图书期刊资源,随时随地畅享阅读乐趣

Low temperature oxidation of CVD SiC by electron cyclotron resonance plasma

Low temperature oxidation of CVD SiC by electron cyclotron resonance plasma

Takashi Goto; Hiroshi Masumoto; Mineo Niizuma
  • 作者Takashi Goto; Hiroshi Masumoto; Mineo Niizuma
  • 卷第75卷
  • 印刷ISSN0254-0584
  • 文件大小230.59KB
  • 发表时间2002
  • DOI10.1016/s0254-0584(02)00068-8
  • 页码235-240
← 返回【学霸图书馆】主页