Influence of growth temperature on the microcrystallinity and native defect structure of hydrogenated amorphous silicon

• 作者M. Härting; D.T. Britton; R. Bucher; E. Minani; A. Hempel; M. Hempel; T.P. Ntsoane; C. Arendse; D. Knoesen
• 印刷ISSN0022-3093
• 文件大小283.66KB
• 发表时间2002
• DOI10.1016/s0022-3093(01)01185-1