A planar electroosmotic micropump
- 期刊名称Journal of Microelectromechanical Systems
- 作者Chuan-Hua Chen, ; Santiago, J.G.
- 卷第11卷
- 期第6期
- 印刷ISSN1057-7157
- 文件大小972.56KB
- 发表时间2002-12
- DOI10.1109/JMEMS.2002.805055
- 页码672-683
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