Synchrotron-radiation-induced wet etching of germanium
- 期刊名称Applied Physics Letters
- 作者Ma, Qing; Moldovan, Nicolaie; Mancini, Derrick C.; Rosenberg, Richard A.
- 卷第81卷
- 期第9期
- 印刷ISSN0003-6951
- 文件大小357.34KB
- 发表时间2002
- DOI10.1063/1.1499530
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