![[IEEE 2010 Ninth IEEE Sensors Conference (SENSORS 2010) - Kona, HI (2010.11.1-2010.11.4)] 2010 IEEE Sensors - Design of a SOI MEMS resonant electric field sensor for power engineering applications]()
[IEEE 2010 Ninth IEEE Sensors Conference (SENSORS 2010) - Kona, HI (2010.11.1-2010.11.4)] 2010 IEEE Sensors - Design of a SOI MEMS resonant electric field sensor for power engineering applicationsChunrong Peng, ; Pengfei Yang, ; Haiyan Zhang, ; Xin Guo, ; Shanhong Xia, · 2010