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Connectivity of Features in Microlens Array Reduction Photolithography: Generation of Various Patterns with a Single Photomask

Connectivity of Features in Microlens Array Reduction Photolithography: Generation of Various Patterns with a Single Photomask

Wu, Hongkai; Odom, Teri W.; Whitesides, George M.

期刊名称Journal of the American Chemical Society
作者Wu, Hongkai; Odom, Teri W.; Whitesides, George M.
卷第124卷
期第25期
印刷ISSN0002-7863
电子ISSN1520-5126
文件大小147.17KB
发表时间2002-06
DOI10.1021/ja020551k
页码7288-7289

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