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[IEEE 2002 IEEE International Ultrasonics Symposium - Munich, Germany (8-11 Oct. 2002)] 2002 IEEE Ultrasonics Symposium, 2002. Proceedings. - Parametric excitation of whispering gallery modes on circular micromachined polysilicon disks

[IEEE 2002 IEEE International Ultrasonics Symposium - Munich, Germany (8-11 Oct. 2002)] 2002 IEEE Ultrasonics Symposium, 2002. Proceedings. - Parametric excitation of whispering gallery modes on circular micromachined polysilicon disks

Kaajakari, V.; Lal, A.
  • 作者Kaajakari, V.; Lal, A.
  • 卷第2卷
  • 文件大小1361.88KB
  • 发表时间2002
  • DOI10.1109/ultsym.2002.1192467
  • 页码1015-1018
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