Optimal scheduling techniques for cluster tools with process-module and transport-module residency constraints
- 期刊名称IEEE Transactions on Semiconductor Manufacturing
- 作者Rostami, S.; Hamidzadeh, B.
- 卷第15卷
- 期第3期
- 印刷ISSN0894-6507
- 文件大小359.80KB
- 发表时间2002-08
- DOI10.1109/tsm.2002.801379
- 页码341-349
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