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Growth dynamics of Si[sub 1−y]C[sub y] and Si[sub 1−x−y]Ge[sub x]C[sub y] on Si(001) surface from disilane, germane, and methylsilane

Growth dynamics of Si[sub 1−y]C[sub y] and Si[sub 1−x−y]Ge[sub x]C[sub y] on Si(001) surface from disilane, germane, and methylsilane

R. W. Price; E. S. Tok; N. J. Woods; J. Zhang

作者R. W. Price; E. S. Tok; N. J. Woods; J. Zhang
文件大小297.27KB
发表时间2002
DOI10.1063/1.1519734

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