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Growth and characterization of zirconium oxynitride films prepared by reactive direct current magnetron sputtering

Growth and characterization of zirconium oxynitride films prepared by reactive direct current magnetron sputtering

Venkataraj, S.; Kappertz, O.; Jayavel, R.; Wuttig, M.

期刊名称Journal of Applied Physics
作者Venkataraj, S.; Kappertz, O.; Jayavel, R.; Wuttig, M.
卷第92卷
期第5期
印刷ISSN0021-8979
文件大小347.46KB
发表时间2002
DOI10.1063/1.1498963

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