Development of a microwave microelectromechanical systems switch
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Qiu, S. N.; Qiu, C. X.; Shih, I.; Yu, M.; Brassard, G.; Séguin, G.
- 卷第20卷
- 期第3期
- 印刷ISSN0734-2101
- 文件大小513.55KB
- 发表时间2002
- DOI10.1116/1.1467355
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