Model and probe measurements of inductively coupled CF[sub 4] discharges
- 期刊名称Journal of Applied Physics
- 作者Kimura, T.; Ohe, K.
- 卷第92卷
- 期第4期
- 印刷ISSN0021-8979
- 文件大小336.39KB
- 发表时间2002
- DOI10.1063/1.1491023
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