Column angle variations in porous chevron thin films
- 期刊名称Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
- 作者Harris, K. D.; Vick, D.; Smy, T.; Brett, M. J.
- 卷第20卷
- 期第6期
- 印刷ISSN0734-2101
- 文件大小691.57KB
- 发表时间2002
- DOI10.1116/1.1517258
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