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[IEEE ITherm 2002. Eighth Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems - San Diego, CA, USA (30 May-1 June 2002)] ITherm 2002. Eighth Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (Cat. No.02CH37258) - Modeling superconformal electrodeposition in trenches

[IEEE ITherm 2002. Eighth Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems - San Diego, CA, USA (30 May-1 June 2002)] ITherm 2002. Eighth Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems (Cat. No.02CH37258) - Modeling superconformal electrodeposition in trenches

Wheeler, D.; Josell, D.; Moffat, T.P.
  • 作者Wheeler, D.; Josell, D.; Moffat, T.P.
  • 文件大小477.54KB
  • 发表时间2002
  • DOI10.1109/itherm.2002.1012540
  • 页码827-832
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