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[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (6-8 Nov. 2002)] 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. - Micro field emitter with nano-pillarets formed by RIE of photoresist

[Japan Soc. Appl. Phys Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International Microprocesses and Nanotechnology Conference - Tokyo, Japan (6-8 Nov. 2002)] 2002 International Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. - Micro field emitter with nano-pillarets formed by RIE of photoresist

Baba, A.; Yoshida, T.; Asano, T.

作者Baba, A.; Yoshida, T.; Asano, T.
文件大小154.54KB
发表时间2002
DOI10.1109/imnc.2002.1178678
页码332-333

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