Superconformal Electrodeposition of Silver in Submicrometer Features

Moffat, T. P.; Baker, B.; Wheeler, D.; Bonevich, J. E.; Edelstein, M.; Kelly, D. R.; Gan, L.; Stafford, G. R.; Chen, P. J.; Egelhoff, W. F.; Josell, D.

期刊名称Journal of The Electrochemical Society
作者Moffat, T. P.; Baker, B.; Wheeler, D.; Bonevich, J. E.; Edelstein, M.; Kelly, D. R.; Gan, L.; Stafford, G. R.; Chen, P. J.; Egelhoff, W. F.; Josell, D.
卷第149卷
期第8期
印刷ISSN0013-4651
文件大小271.72KB
发表时间2002
DOI10.1149/1.1490357

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Superconformal Electrodeposition of Silver in Submicrometer Features