Growth Characteristics of SiC in a Hot-Wall CVD Reactor with Rotation
Zhang, Jie; Forsberg, Urban; Isacson, M.; Ellison, Alexsandre; Henry, Anne; Kordina, Olle; Janzén, Erik
- 期刊名称Materials Science Forum
- 作者Zhang, Jie; Forsberg, Urban; Isacson, M.; Ellison, Alexsandre; Henry, Anne; Kordina, Olle; Janzén, Erik
- 电子ISSN1662-9752
- 文件大小400.77KB
- 发表时间2002
- DOI10.4028/www.scientific.net/MSF.389-393.191
- 页码191-194