Aluminum Incorporation into 4H-SiC Layers during Epitaxial Growth in a Hot-Wall CVD System
- 期刊名称Materials Science Forum
- 作者Wagner, Günter; Leitenberger, W.; Irmscher, K.; Schmid, Frank; Laube, Michael; Pensl, Gerhard
- 电子ISSN1662-9752
- 文件大小303.20KB
- 发表时间2002
- DOI10.4028/www.scientific.net/MSF.389-393.207
- 页码207-210
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