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Metal organic chemical vapor deposition growth of epitaxial SrRuO3 and CaRuO3 thin films with different orientations as the bottom electrode for epitaxial ferroelectric thin film

Metal organic chemical vapor deposition growth of epitaxial SrRuO3 and CaRuO3 thin films with different orientations as the bottom electrode for epitaxial ferroelectric thin film

Hiroshi Funakubo; Takahiro Oikawa; Noriyuki Higashi; Keisuke Saito
  • 作者Hiroshi Funakubo; Takahiro Oikawa; Noriyuki Higashi; Keisuke Saito
  • 卷第235卷
  • 印刷ISSN0022-0248
  • 文件大小286.93KB
  • 发表时间2002
  • DOI10.1016/s0022-0248(01)01921-2
  • 页码401-406
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