Chemical and electronic structure of ultrathin zirconium oxide films on silicon as determined by photoelectron spectroscopy
S Miyazaki; M Narasaki; M Ogasawara; M Hirose
- 作者S Miyazaki; M Narasaki; M Ogasawara; M Hirose
- 卷第46卷
- 期第11期
- 印刷ISSN0038-1101
- 文件大小259.19KB
- 发表时间2002
- DOI10.1016/s0038-1101(02)00161-2
- 页码1679-1685