Surface metrology using reflected ultrasonic signals in air
- 作者T.J. Robertson; D.A. Hutchins; D.R. Billson; J.H. Rakels; D.W. Schindel
- 卷第39卷
- 期第7期
- 印刷ISSN0041-624X
- 文件大小679.59KB
- 发表时间2002
- DOI10.1016/s0041-624x(01)00086-5
- 页码479-486
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