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[Japan Soc. Appl. Phys 2002 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2002) - Kobe, Japan (4-6 Sept. 2002)] International Conferencre on Simulation of Semiconductor Processes and Devices - Simulation of substrate currents

[Japan Soc. Appl. Phys 2002 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2002) - Kobe, Japan (4-6 Sept. 2002)] International Conferencre on Simulation of Semiconductor Processes and Devices - Simulation of substrate currents

Schoenmaker, W.; Meuris, P.; Magnus, W.; Maleszka, B.
  • 作者Schoenmaker, W.; Meuris, P.; Magnus, W.; Maleszka, B.
  • 文件大小351.64KB
  • 发表时间2002
  • DOI10.1109/SISPAD.2002.1034521
  • 页码79-82
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