Pulsed laser deposition of TiO2 for MOS gate dielectric

Roy Paily; Amitava DasGupta; Nandita DasGupta; Pijush Bhattacharya; Pankaj Misra; Tapas Ganguli; Lalit M Kukreja; A.K Balamurugan; S Rajagopalan; A.K Tyagi

作者Roy Paily; Amitava DasGupta; Nandita DasGupta; Pijush Bhattacharya; Pankaj Misra; Tapas Ganguli; Lalit M Kukreja; A.K Balamurugan; S Rajagopalan; A.K Tyagi
卷第187卷
印刷ISSN0169-4332
文件大小195.67KB
发表时间2002
DOI10.1016/s0169-4332(01)01040-6
页码297-304

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Pulsed laser deposition of TiO2 for MOS gate dielectric