Quality control of ultra-thin and super-hard coatings by laser-acoustics
- 作者Dieter Schneider; Peter Siemroth; Thomas Schülke; Jan Berthold; Bernd Schultrich; Hans-Hermann Schneider; Ralf Ohr; Bernd Petereit; Heinz Hillgers
- 卷第153卷
- 印刷ISSN0257-8972
- 文件大小487.69KB
- 发表时间2002
- DOI10.1016/s0257-8972(01)01664-4
- 页码252-260