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The effects of structure, composition, and chemical bonding on the mechanical properties of Si-aC:H thin films

Ryan D Evans; Gary L Doll; Philip W Morrison Jr; James Bentley; Karren L More; Jeffrey T Glass

作者Ryan D Evans; Gary L Doll; Philip W Morrison Jr; James Bentley; Karren L More; Jeffrey T Glass
卷第157卷
印刷ISSN0257-8972
文件大小1114.66KB
发表时间2002
DOI10.1016/s0257-8972(02)00164-0
页码197-206