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Determination of Young’s modulus of electroplated nickel–iron (Ni/Fe) and micro-machined Si thin films by the balance method

Determination of Young’s modulus of electroplated nickel–iron (Ni/Fe) and micro-machined Si thin films by the balance method

Jian Zhang

作者Jian Zhang
卷第123卷
期第3期
印刷ISSN0924-0136
文件大小178.90KB
发表时间2002
DOI10.1016/s0924-0136(02)00012-2
页码329-335

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