[IEEE Proceedings of the 2002 14th International Conference on Ion Implantation Technology - Taos, New Mexico, USA (2002.9.22-2002.9.27)] Ion Implantation Technology. 2002. Proceedings of the 14th International Conference on - SIMOX wafer fabrication by 100mA O+ implantation using the UI-6000 implanter
- 作者Tokiguchi, K.; Seki, H.; Seki, T.; Itou, J.; Higuchi, Y.; Mera, K.; Tanaka, S.; Yamashita, Y.; Hashimoto, I.; Yoshikawa, A.
- 文件大小1965.95KB
- 发表时间2002
- DOI10.1109/iit.2002.1258084
- 页码629-632
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